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IndyStar Series-Excimer Laser

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Product Specifications from Coherent Inc

The features are High repetition rates (up to 2000Hz), Industrial design with Semi-S2-certificate, Almeta-tube technology, Corona preionization, Solid-state switch, Equipped with "POWERLOK" and "TIMELOK" function, Available at 193 nm and 248 nm, Many billion pulses lifetime for tube and optics, Compact size (LxWxH: 978 x 380 x 837 mm3), Ease of use / RoHS compliance, Used in photomask inspection, microdrilling, optics testing, micromachining, and direct writing on the mezzo- and micro-scales